FIB-SEM for FIB-centric nanofabrication

Benefit from achieving results faster by eliminating time-consuming and yield-limiting steps in the lithography-process like etching of new and challenging materials. Direct milling and etching are possible for the creation of 3D structures, even on topographic samples and distributed over large areas.

Prepare your TEM samples with FIB milling and SEM live control in-situ. Gas injection systems, nano probers, and accurate end-point control enable various sample preparation applications.

Check your process development and results in-situ. With advanced stage setups, high-resolution SEM, and automated metrology, process control can be performed directly for fast parameter optimization.

Exploit the unlimited opportunities of combined FIB and SEM in a single tool. Applying the SEM to basic EBL processes is also possible thanks to features including sophisticated parameter control, automatic scans, and proximity effect correction.

With numerous universal ports on the vacuum chamber, VELION supports a configurable setup that can be upgraded in the future. Among other things, the FIB-SEM system can be fitted with different multi- and mono-line gas injection systems. Usinf multiple GISs from opposite directions allows for gas-induced processes such as wiring of nanoobjects and X-section analysis. Gas-assisted etching provides better selectivity, improved removal rates, and less redeposition.

An additional new add-on option is a nanoprofilometer, which allows both 3D process control and lateral secondary electron imaging information. The 3D surface imaging solution nanoSense helps to qualify deposition, etching, and milling processes in situ within minutes. Further options include cartesian nano-manipulators, various optical cameras, chamber de-contaminator, sample auto height sensing, and more.

The nanoFIB Three technology is used for the stable delivery of gold, silicon, or other ions with nanometer beam diameters. The flow optimized alloy ion source and low aberration ion optics enable easy switching between multiple ion species from a single source, while preserving the high resolution and stability of the nanoFIB Three column.

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IONselect offers a range of species from doubly charged light ions to heavy ions and clusters, all with excellent handling, enabling different yet-to-be-explored nanofabrication techniques. Processing with low contamination, specific functionalization, higher resolution or surface sensitive milling will pave the way for new breakthroughs in next-generation research.